Correlation of high-resolution X-ray diffraction with mechanical experiments and finite-element analysis
نویسندگان
چکیده
منابع مشابه
In situ MEMS testing: correlation of high-resolution X-ray diffraction with mechanical experiments and finite element analysis
New methods are needed in microsystems technology for evaluating microelectromechanical systems (MEMS) because of their reduced size. The assessment and characterization of mechanical and structural relations of MEMS are essential to assure the long-term functioning of devices, and have a significant impact on design and fabrication. Within this study a concept for the investigation of mechanic...
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ژورنال
عنوان ژورنال: Acta Crystallographica Section A Foundations and Advances
سال: 2019
ISSN: 2053-2733
DOI: 10.1107/s2053273319091228